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1. (WO2018133239) METHOD FOR PREPARING DUSTPROOF SURFACE

Pub. No.:    WO/2018/133239    International Application No.:    PCT/CN2017/081797
Publication Date: Fri Jul 27 01:59:59 CEST 2018 International Filing Date: Wed Apr 26 01:59:59 CEST 2017
IPC: C23C 16/513
C23C 16/455
C23C 28/00
C23C 16/02
Applicants: JIANGSU FAVORED NANOTECHNOLOGY CO., LTD.
江苏菲沃泰纳米科技有限公司
Inventors: ZHONG, Jian
宗坚
Title: METHOD FOR PREPARING DUSTPROOF SURFACE
Abstract:
A method for preparing a dustproof surface, comprising the following steps: (1) placing a substrate in a reaction cavity of a plasma chamber, continuously vacuumizing the reaction cavity till the vacuum degree in the reaction cavity reaches 10-200 millitorr, and introducing an inert gas or nitrogen; (2) introducing monomer vapor till the vacuum degree reaches 30-300 millitorr, enabling plasma discharge, the plasma discharge power being 2-150 W and the discharge time being 600-7,200 s, and performing chemical vapor deposition to prepare a compact coating; after the deposition of the compact coating is completed, adjusting the plasma discharge power to 160-500 W and the discharge time to 60-1,000 s, and performing chemical vapor deposition to prepare a rough coating; and preparing, on the surface of the substrate, a dustproof surface with an inner layer being a compact coating and an outer layer being a rough coating, the component of the monomer vapor introduced in step (2) being a mixture of at least one monofunctional unsaturated fluorocarbon resin and at least one polyfunctional unsaturated hydrocarbon derivative, the mass fraction of the polyfunctional unsaturated hydrocarbon derivative in the monomer vapor being 10-80%; and (3) stopping the plasma discharge, stopping introducing the monomer vapor, continuously vacuumizing, after maintaining the vacuum degree of the reaction cavity at 10-200 millitorr, introducing air till the pressure reaches an atmospheric pressure, and then taking out the substrate.