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1. (WO2018132164) RF DETECTOR WITH DOUBLE BALANCED LINEAR MIXER AND CORRESPONDING METHOD OF OPERATION
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Pub. No.: WO/2018/132164 International Application No.: PCT/US2017/060379
Publication Date: 19.07.2018 International Filing Date: 07.11.2017
IPC:
H01J 37/32 (2006.01) ,H01L 21/67 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32
Gas-filled discharge tubes
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
Applicants:
LAM RESEARCH CORPORATION [US/US]; 4650 Cushing Parkway Fremont, California 94538, US
Inventors:
HANKS, Ernest Beauel; US
PEASE, John; US
Agent:
WIGGINS, Michael D.; US
AMBROSE, John; US
AQUINO, Damian; US
BERBERICH, Jeanette M.; US
BRENNAN, Michael P.; US
BRITT, Nancy K.; US
BROCK, Christopher M.; US
CASTELLANO, John A., III; US
CAUBLE, Christopher M.; US
CHANG, Alex C.; US
CHAPP, Jeffrey J.; US
CHO, David J.; US
CUTLER, Matthew L.; US
DALEY, Donald J.; US
DEAVER, Darin W.; US
DELASSUS, Gregory S.; US
DOERR, Michael P.; US
DOWDY, Stephanie L.; US
DRYSDALE, Nicholas S.; US
ELCHUK, Mark D.; US
ERJAVAC, Stanley M.; US
EUSEBI, Christopher A.; US
FALCOFF, Monte L.; US
FITZPATRICK, John; US
FORBIS, Glenn E.; US
FOSS, Stephen J.; US
FRANKLIN, Clarence C.; US
FRENTRUP, Mark A.; US
FULLER, Roland, III; US
FUSSNER, Anthony G.; US
GAMBLE, Michael D.; US
HEIST, Jason A.; US
HILTON, Michael E.; US
HOFFMAN, Erin G.; US
HOUSTON, Robert W.; US
HOYT, Blair M.; US
JENLINK, Ryan D.; US
KELLER, Paul A.; US
KESKAR, Hemant; US
KIM, Paul M.; US
KIM, Sung Pil; US
KORAL, Elisabeth; US
KOTSIS, Damian; US
KOZU, Kiyoshi; US
LAFATA, Joseph M.; US
LEE, Kisuk; US
LUCHSINGER, J. Bradley; US
MACINTYRE, Timothy D.; US
MALINZAK, Michael; US
MANNING, Daisy; US
MARTIN, Timothy J.; US
MASSEY, Ryan W.; US
MEYER, Greg; US
MIERZWA, Kevin; US
MILLER, Christopher K.; US
MILLER, Keith H.; US
MOUSTAKAS, George D.; US
NABI, Tarik M.; US
NYE, Michael; US
ODELL, Elizabeth D.; US
OLSON, Stephen T.; US
PANKA, Brian G.; US
PHIPPS, Michael J.; US
RAKERS, Leanne; US
RICHMOND, Derek; US
ROBINSON, Douglas A.; US
SCHIANO, Thomas E.; US
SCHIVLEY, Gregory G.; US
SCHMIDT, Michael J.; US
SEITZ, Brent G.; US
SIMINSKI, Robert M.; US
SMITH, Corey E.; US
SMITH, Michael L.; US
SNYDER, Jeffrey L.; US
STOBBS, Gregory A.; US
SUTER, David L.; US
TAYLOR, Michael L.; US
TAYLOR, W. R. Duke; US
TEICH, Michael L.; US
TELSCHER, JR., Rudolph A.; US
THOMAS, Michael J.; US
TUCKER, David J., Jr.; US
UTYKANSKI, David P.; US
VARCO, Michael A.; US
WADE, Bryant E.; US
WALKER, Donald G.; US
WALSH, JR., Joseph E.; US
WANGEROW, Steven; US
WARNER, Richard W.; US
WAXMAN, Andrew M.; US
WELCH, Gerald T.; US
WHEELOCK, Bryan K.; US
WOODSIDE, Jennifer; US
YACURA, Gary D.; US
ZALOBSKY, Michael D.; US
ZAREK, Paul; US
Priority Data:
15/405,91313.01.2017US
Title (EN) RF DETECTOR WITH DOUBLE BALANCED LINEAR MIXER AND CORRESPONDING METHOD OF OPERATION
(FR) DÉTECTEUR RF À MÉLANGEUR LINÉAIRE ÉQUILIBRÉ DOUBLE ET PROCÉDÉ DE FONCTIONNEMENT CORRESPONDANT
Abstract:
(EN) A RF detector is provided and includes LO and RF paths, a mixer and a filter. The LO path includes a first buffer and a sine-to-square wave converter. The first buffer receives a first RF signal that is based on a RF input signal received by the RF detector. The RF input signal is detected within a substrate processing system. The sine-to-square wave converter converts a sine wave of the first RF signal to a square wave and outputs a LO signal having the square wave. The RF path incudes a second buffer that receives a second RF signal and outputs a RF output signal. The second RF signal is based on the RF input signal. The mixer generates an IF signal based on the LO and RF output signals. The filter filters the IF signal to generate a DC signal, which is representative of the second RF signal.
(FR) L'invention concerne un détecteur RF comprenant des trajets LO et RF, un mélangeur et un filtre. Le trajet LO comprend un premier tampon et un convertisseur d'onde sinusoïdale-carrée. Le premier tampon reçoit un premier signal RF qui est basé sur un signal d'entrée RF reçu par le détecteur RF. Le signal d'entrée RF est détecté dans un système de traitement de substrat. Le convertisseur d'onde sinusoïdale-carrée convertit une onde sinusoïdale du premier signal RF en une onde carrée et délivre un signal LO dont l'onde est carrée. Le trajet RF comprend un second tampon qui reçoit un second signal RF et délivre un signal de sortie RF. Le second signal RF est basé sur le signal d'entrée RF. Le mélangeur génère un signal IF sur la base des signaux de sortie LO et RF. Le filtre filtre le signal IF pour générer un signal CC, qui est représentatif du second signal RF.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)