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1. (WO2018131616) METHOD FOR MANUFACTURING ORGANIC EL DISPLAY PANEL, AND INK DRYING DEVICE
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Pub. No.: WO/2018/131616 International Application No.: PCT/JP2018/000373
Publication Date: 19.07.2018 International Filing Date: 10.01.2018
IPC:
H05B 33/10 (2006.01) ,H01L 27/32 (2006.01) ,H01L 51/50 (2006.01) ,H05B 33/12 (2006.01) ,H05B 33/22 (2006.01)
H ELECTRICITY
05
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
B
ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR
33
Electroluminescent light sources
10
Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
27
Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
28
including components using organic materials as the active part, or using a combination of organic materials with other materials as the active part
32
with components specially adapted for light emission, e.g. flat-panel displays using organic light-emitting diodes
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
51
Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof
50
specially adapted for light emission, e.g. organic light emitting diodes (OLED) or polymer light emitting devices (PLED)
H ELECTRICITY
05
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
B
ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR
33
Electroluminescent light sources
12
Light sources with substantially two-dimensional radiating surfaces
H ELECTRICITY
05
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
B
ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR
33
Electroluminescent light sources
12
Light sources with substantially two-dimensional radiating surfaces
22
characterised by the chemical or physical composition or the arrangement of auxiliary dielectric or reflective layers
Applicants: JOLED INC.[JP/JP]; 23, Kandanishiki-cho 3-chome, Chiyoda-ku, Tokyo 1010054, JP
Inventors: FUKUDA Toshio; --
MAEDA Noriteru; --
Agent: NAKAJIMA & ASSOCIATES IP FIRM; 6F, Yodogawa 5-Bankan, 2-1, Toyosaki 3-chome, Kita-ku, Osaka-shi Osaka 5310072, JP
Priority Data:
2017-00192810.01.2017JP
Title (EN) METHOD FOR MANUFACTURING ORGANIC EL DISPLAY PANEL, AND INK DRYING DEVICE
(FR) PROCÉDÉ DE FABRICATION D'UN PANNEAU D'AFFICHAGE ÉLECTROLUMINESCENT ORGANIQUE, ET DISPOSITIF DE SÉCHAGE D'ENCRE
(JA) 有機EL表示パネルの製造方法、及びインク乾燥装置
Abstract:
(EN) [Problem] To achieve uniform film thickness of a light emitting layer 123 of an organic EL display panel 10 and to thereby reduce brightness irregularities. [Solution] An ink drying step includes a step of exhausting a gas from an atmosphere in which a substrate 100x is contained, and a step of forming an organic function layer 123 by drying ink by placing the substrate 100x in a state in which the pressure of the atmosphere is not more than a predetermined pressure. The step of exhausting the gas includes a first period T1 in which the pressure of the atmosphere is reduced from a normal atmospheric pressure to a first pressure P1 higher than a maximum vapor pressure among vapor pressures of a plurality of solvents, and a second period T2 in which, after the first period, the pressure of the atmosphere is reduced to a second pressure P2 lower than a minimum vapor pressure among the vapor pressures of the plurality of solvents. When the pressure of the atmosphere is 10X Pa (X is a real number), an average value of the amounts of change in the value of X per unit time in the second period T2 is greater in absolute value than an average value of the amounts of change in the value of X per unit time in the first period T1.
(FR) Le problème décrit par la présente invention est d'obtenir une épaisseur de couche uniforme d'une couche électroluminescente (123) d'un panneau d'affichage électroluminescent organique (10) et de réduire ainsi les irrégularités de luminosité. La solution selon l'invention consiste en une étape de séchage d'encre qui comprend une étape d'évacuation d'un gaz d'une atmosphère dans laquelle un substrat (100x) est contenu, et une étape de formation d'une couche de fonction organique (123) par séchage d'encre en plaçant le substrat (100x) dans un état dans lequel la pression de l'atmosphère n'est pas supérieure à une pression prédéterminée. L'étape d'évacuation du gaz comprend une première période (T1) dans laquelle la pression de l'atmosphère est réduite d'une pression atmosphérique normale à une première pression (P1) supérieure à une pression de vapeur maximale parmi des pressions de vapeur d'une pluralité de solvants, et une seconde période (T2) dans laquelle, après la première période, la pression de l'atmosphère est réduite à une seconde pression (P2) inférieure à une pression de vapeur minimale parmi les pressions de vapeur de la pluralité de solvants. Lorsque la pression de l'atmosphère est de 10X Pa (X étant un nombre réel), une valeur moyenne des quantités de changement de la valeur de X par unité de temps dans la seconde période (T2) est supérieure en valeur absolue à une valeur moyenne des quantités de changement de la valeur de X par unité de temps dans la première période (T1).
(JA) 【課題】有機EL表示パネル10の発光層123の膜厚の均一化を図り輝度ムラを改善する。 【解決手段】インク乾燥工程は、基板100xを含む雰囲気から気体を排気する工程と、雰囲気の圧力が所定圧力以下の状態に基板100xを置くことによりインクを乾燥させて有機機能層123を形成する工程を含み、気体を排気する工程は、雰囲気の圧力を、標準大気圧から複数の溶媒それぞれの蒸気圧中、最大の蒸気圧よりも高い第1の圧力P1まで減圧する第1の期間T1と、第1の期間の後に、雰囲気の圧力を、複数の溶媒それぞれの蒸気圧中、最小の蒸気圧よりも低い第2の圧力P2まで減圧する第2の期間T2とを含み、雰囲気の圧力を10XPa(Xは実数)としたとき、第2の期間T2における単位時間当たりのXの値の変化量の平均値は、第1の期間T1における単位時間当たりのXの値の変化量の平均値よりも絶対値が大きい。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)