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1. (WO2018131149) POWDER STORING CONTAINER AND METHOD FOR INSPECTING FOREIGN MATERIAL

Pub. No.:    WO/2018/131149    International Application No.:    PCT/JP2017/001124
Publication Date: Fri Jul 20 01:59:59 CEST 2018 International Filing Date: Sat Jan 14 00:59:59 CET 2017
IPC: G01N 21/03
G01N 1/36
G01N 21/11
G01N 21/3586
Applicants: NIKON CORPORATION
株式会社ニコン
SPECTRA DESIGN LTD.
有限会社スペクトルデザイン
Inventors: IKARI, Tomofumi
碇 智文
UMETSU, Eriko
梅津 枝里子
FUKASAWA, Ryoichi
深澤 亮一
TAKAHASHI, Norimasa
高橋 功将
Title: POWDER STORING CONTAINER AND METHOD FOR INSPECTING FOREIGN MATERIAL
Abstract:
The storing container according to the present invention is provided with a storing section, in which a recessed section for storing a powder is formed, and a cover member covering the powder stored in the recessed section, and the storing container stores, with a uniform density, the powder in the recessed section.