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1. (WO2018131146) EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM

Pub. No.:    WO/2018/131146    International Application No.:    PCT/JP2017/001106
Publication Date: Fri Jul 20 01:59:59 CEST 2018 International Filing Date: Sat Jan 14 00:59:59 CET 2017
IPC: G03F 7/20
H05G 2/00
Applicants: GIGAPHOTON INC.
ギガフォトン株式会社
Inventors: NISHIMURA Yuichi
西村 祐一
YABU Takayuki
薮 隆之
UENO Yoshifumi
植野 能史
Title: EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
Abstract:
This extreme ultraviolet light generation system is provided with: a target supply unit; a prepulse laser that outputs prepulse laser light; a main pulse laser that outputs main pulse laser light; a light collecting optical system that collects the prepulse laser light and the main pulse laser light to a predetermined region; an actuator that changes the position to which the prepulse laser light is to be collected by means of the light collecting optical system; a first sensor which, after the prepulse laser light is irradiated, picks up an image of a target before the main pulse laser light is irradiated; and a control unit, which stores the reference position of the actuator, and which, after the prepulse laser light is irradiated, calculates predetermined parameters on the basis of image data acquired from the first sensor, said predetermined parameters relating to the target not having been irradiated with the main pulse laser light, and which, in the cases where the predetermined parameters do not meet first conditions, controls the actuator so that the actuator is close to the reference position.