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1. (WO2018129435) METHOD OF MEASURING RAMAN SCATTERING AND RELATED SPECTROMETERS AND LASER SOURCES

Pub. No.:    WO/2018/129435    International Application No.:    PCT/US2018/012755
Publication Date: Fri Jul 13 01:59:59 CEST 2018 International Filing Date: Tue Jan 09 00:59:59 CET 2018
IPC: G01J 3/44
H01S 3/08
H01S 3/042
Applicants: MKS TECHNOLOGY, INC.
Inventors: CARRON, Keith, T.
ZEMTSOP, Celestin, P.
BULLER, Shane, A.
RUDDER, Scott, L.
GUENTHER, Harald, R.
Title: METHOD OF MEASURING RAMAN SCATTERING AND RELATED SPECTROMETERS AND LASER SOURCES
Abstract:
A method of measuring Raman scattering includes exciting Raman scattering of a sample with a first wavelength and a second wavelength of electromagnetic radiation traveling along a common optical path to form a first scattered radiation and a second scattered radiation. The first wavelength reaches the sample polarized in a first direction, and the second wavelength reaches the sample polarized in a second direction perpendicular to the first direction. The method includes collecting a first Raman spectrum from the first scattered radiation, collecting a second Raman spectrum from the second scattered radiation, and forming a decomposed Raman spectrum based on the first Raman spectrum and the second Raman spectrum. The decomposed Raman spectrum may be substantially free of noise, such as fluorescence and background radiation. Related spectrometers and laser devices are disclosed.