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1. (WO2018129084) DETERMINATION OF SAMPLING MAPS FOR ALIGNMENT MEASUREMENTS BASED ON REDUCTION OF OUT OF SPECIFICATION POINTS

Pub. No.:    WO/2018/129084    International Application No.:    PCT/US2018/012245
Publication Date: Fri Jul 13 01:59:59 CEST 2018 International Filing Date: Thu Jan 04 00:59:59 CET 2018
IPC: H01L 21/66
H01L 21/67
Applicants: KLA-TENCOR CORPORATION
Inventors: PIERSON, Wiliam
DEMIRER, Onur N.
RIGGS, Brent
Title: DETERMINATION OF SAMPLING MAPS FOR ALIGNMENT MEASUREMENTS BASED ON REDUCTION OF OUT OF SPECIFICATION POINTS
Abstract:
A system for determining a sample map for alignment measurements includes a metrology tool and a controller. The controller defines a full sampling map including a plurality of measurement locations. The controller directs the metrology tool to measure alignment at each measurement location of the full sampling map for a plurality of samples to generate a reference alignment dataset, generates candidate sampling maps, each being a subset of the full sampling map. The controller may further estimate alignment as a function of location based on the two or more candidate sampling maps at each measurement location of the full sampling map, and determine a working sampling map by comparing the estimated alignment to the reference alignment dataset and selecting the candidate sampling map having a smallest number of alignment estimates exceeding a selected tolerance.