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1. (WO2018128771) PROTECTIVE OXIDE COATING WITH REDUCED METAL CONCENTRATIONS
Latest bibliographic data on file with the International Bureau    Submit observation

Pub. No.: WO/2018/128771 International Application No.: PCT/US2017/066609
Publication Date: 12.07.2018 International Filing Date: 15.12.2017
IPC:
C25D 11/02 (2006.01) ,C25D 11/12 (2006.01) ,C25D 11/18 (2006.01) ,C25D 11/26 (2006.01) ,C25D 11/30 (2006.01) ,C25D 11/34 (2006.01) ,C25D 11/06 (2006.01) ,C25D 11/08 (2006.01)
Applicants: MKS INSTRUMENTS, INC.[US/US]; 2 Tech Drive, Suite 201 Andover, MA 01810, US
Inventors: TAI, Chiu-Ying; US
GUPTA, Atul; US
WENZEL, Kevin; US
STANTON, Glenn; US
Agent: RASMUSSEN, Xin, Hu; US
BAUER, Steven; US
CONSALVI, Mary; US
SHALEK, James; US
COUSINS, Abigail; US
Priority Data:
15/400,63506.01.2017US
Title (EN) PROTECTIVE OXIDE COATING WITH REDUCED METAL CONCENTRATIONS
(FR) REVÊTEMENT D'OXYDE PROTECTEUR À CONCENTRATIONS RÉDUITES EN MÉTAL
Abstract: front page image
(EN) A method is introduced for creating a protective oxide layer over a surface of a metallic structure for use in a semiconductor processing system. The method includes providing the metallic structure, anodizing the surface of the metallic structure to form an anodization layer on the surface, and converting, using a plasma electrolytic oxidation process, at least a portion of the anodization layer to form the protective oxide layer.
(FR) Cette invention concerne un procédé de création d'une couche d'oxyde protectrice sur une surface d'une structure métallique destinée à être utilisée dans un système de traitement de semi-conducteurs. Le procédé comprend la fourniture de la structure métallique, l'anodisation de la surface de la structure métallique pour former une couche d'anodisation sur la surface, et la conversion, à l'aide d'un procédé d'oxydation électrolytique au plasma, d'au moins une partie de la couche d'anodisation pour former la couche d'oxyde protectrice.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)