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1. (WO2018128641) DEVICE-LIKE METROLOGY TARGETS

Pub. No.:    WO/2018/128641    International Application No.:    PCT/US2017/019713
Publication Date: Fri Jul 13 01:59:59 CEST 2018 International Filing Date: Tue Feb 28 00:59:59 CET 2017
IPC: G01B 11/25
G02B 27/60
Applicants: KLA-TENCOR CORPORATION
Inventors: LEVINSKI, Vladimir
MANASSEN, Amnon
AMIR, Eran
AMIR, Nuriel
YERUSHALMI, Liran
SHAKED, Amit
Title: DEVICE-LIKE METROLOGY TARGETS
Abstract:
Metrology targets, production processes and optical systems are provided, which enable metrology of device-like targets. Supplementary structure(s) may be introduced in the target to interact optically with the bottom layer and/or with the top layer of the target and target cells configurations enable deriving measurements of device-characteristic features. For example, supplementary structure(s) may be designed to yield Moiré patterns with one or both layers, and metrology parameters may be derived from these patterns. Device production processes were adapted to enable production of corresponding targets, which may be measured by standard or by provided modified optical systems, configured to enable phase measurements of the Moiré patterns.