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1. (WO2018128339) PLASMA GENERATION APPARATUS

Pub. No.:    WO/2018/128339    International Application No.:    PCT/KR2018/000008
Publication Date: Fri Jul 13 01:59:59 CEST 2018 International Filing Date: Wed Jan 03 00:59:59 CET 2018
IPC: H01J 37/32
H05H 1/46
Applicants: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE
한국표준과학연구원
Inventors: LEE, Hyo Chang
이효창
KIM, Jung-Hyung
김정형
SEONG, Dae-Jin
성대진
Title: PLASMA GENERATION APPARATUS
Abstract:
A plasma generation apparatus according to an embodiment of the present invention includes a plasma generation unit. The plasma generation unit has a spherical or ellipsoidal cavity. The plasma generation unit generates plasma by receiving a supply of RF power in the cavity so that electrons recoil and resonate. The cavity includes a plasma extraction hole so that the cavity is connected to an external space.