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1. (WO2018128236) POWER SUPPLY DEVICE FOR PLASMA GENERATION

Pub. No.:    WO/2018/128236    International Application No.:    PCT/KR2017/007908
Publication Date: Fri Jul 13 01:59:59 CEST 2018 International Filing Date: Sat Jul 22 01:59:59 CEST 2017
IPC: H01J 37/32
H03H 7/38
H05H 1/46
Applicants: MEDIPL CO., LTD.
주식회사 메디플
Inventors: PARK, Seung Jin
박승진
KWON, Soon Ku
권순구
Title: POWER SUPPLY DEVICE FOR PLASMA GENERATION
Abstract:
Provided is a power supply device for plasma generation which supplies a high frequency signal amplified to have energy for plasma generation, the power supply device comprising: a frequency generator for generating a signal having a frequency of the high frequency signal; a power amplifier for amplifying power of the signal generated from the frequency generator, and providing same to an output terminal of the power supply device; a voltage/electric current sensor for detecting a voltage and an electric current of the high frequency signal outputted from the power amplifier, and a phase difference between the voltage and the electric current; a variable impedance element unit connected between the power amplifier and the output terminal and comprising a plurality of variable passive elements; and an impedance adjuster for deriving the impedance of a load connected the output terminal, on the basis of the voltage, electric current and phase difference detected by the voltage/electric current sensor, and adjusting the impedance of the variable passive elements on the basis of the impedance of the load.