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1. (WO2018128146) SPECTRAL MEASUREMENT METHOD AND SPECTRAL MEASUREMENT DEVICE

Pub. No.:    WO/2018/128146    International Application No.:    PCT/JP2017/046932
Publication Date: Fri Jul 13 01:59:59 CEST 2018 International Filing Date: Thu Dec 28 00:59:59 CET 2017
IPC: G01N 21/65
G01N 21/27
G02B 21/00
Applicants: TORAY ENGINEERING CO., LTD.
東レエンジニアリング株式会社
KYOTO PREFECTURAL PUBLIC UNIVERSITY CORPRATION
京都府公立大学法人
UKON CRAFT SCIENCE
株式会社右近工舎
OPTONICA CORPORATION
有限会社オプトニカ
Inventors: TAKAMATSU Tetsuro
高松 哲郎
HARADA Yoshinori
原田 義規
KUMAMOTO Yasuaki
熊本 康昭
TANAKA Hideo
田中 秀央
UKON Juichiro
右近 寿一郎
IWAHASHI Yoshitomo
岩橋 賢知
KAWAMURA Akinori
河村 明徳
HOSHINO Shinichi
星野 真一
TSUDA Yuichiro
津田 雄一郎
MATSUMURA Junichi
松村 淳一
Title: SPECTRAL MEASUREMENT METHOD AND SPECTRAL MEASUREMENT DEVICE
Abstract:
Provided are a spectral measurement method and a spectral measurement device which make it possible to precisely and accurately identify the structure constituting a predetermined area in a short amount of time. The spectral measurement method includes: an irradiation step for irradiating a sample S with illumination light L3 for imaging, and then irradiating a plurality of locations with laser light L1, which is illumination light for spectrography; an image acquisition step for acquiring an image V made of the form of the sample S and a plurality of irradiation points of the laser light L1; a spectral measurement step for spectrally measuring light excited by the laser light L1; an image processing step for extracting, from image information in the image V of the sample S, first image areas Ar1 etc., which are image areas formed by an identical structure, and then dividing the extracted image areas as closed areas; and an area determination step for superimposing spectral measurement results onto the irradiation points of the laser light L1 in the image of the sample S which has been divided into the image areas, and then identifying the structure of each image area on the basis of the spectral measurement results of the plurality of irradiation points of the laser light L1 in each image area.