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1. (WO2018128128) LIGHT DETECTOR AND IMAGING DEVICE
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Pub. No.: WO/2018/128128 International Application No.: PCT/JP2017/046676
Publication Date: 12.07.2018 International Filing Date: 26.12.2017
IPC:
H01L 31/10 (2006.01) ,H01L 27/146 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
31
Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
08
in which radiation controls flow of current through the device, e.g. photoresistors
10
characterised by at least one potential-jump barrier or surface barrier, e.g. phototransistors
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
27
Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
14
including semiconductor components sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
144
Devices controlled by radiation
146
Imager structures
Applicants:
富士通株式会社 FUJITSU LIMITED [JP/JP]; 神奈川県川崎市中原区上小田中4丁目1番1号 1-1, Kamikodanaka 4-chome, Nakahara-ku, Kawasaki-shi, Kanagawa 2118588, JP
Inventors:
山下 裕泰 YAMASHITA, Hiroyasu; JP
Agent:
向山 直樹 MUKOUYAMA Naoki; JP
Priority Data:
2017-00122806.01.2017JP
Title (EN) LIGHT DETECTOR AND IMAGING DEVICE
(FR) DÉTECTEUR DE LUMIÈRE ET DISPOSITIF D'IMAGERIE
(JA) 光検知器及び撮像装置
Abstract:
(EN) [Problem] To improve photoelectric conversion efficiency. [Solution] A light detector 68 that has: a photoelectric conversion layer 44 that has a first main surface 44a at which light enters and a second main surface 44b that faces the first main surface 44a, and that performs photoelectric conversion on light; a first diffraction grating 49 that is provided with alternating pluralities of first surfaces 45b that are formed on a second main surface 44b side and extend like stripes in a first direction D1 and second surfaces 45x that are at a different height than the first surfaces 45b and extend like stripes in the first direction D1; pluralities of metal wires 51 that are respectively provided, at intervals, on the first surfaces 45b and the second surfaces 45x and extend along the first direction D1 or a second direction D2 that is orthogonal to the first direction D1; and a second diffraction grating 62 that is formed above the first diffraction grating 49 and has formed therein, at intervals, a plurality of grooves 62a that extend in the second direction D2.
(FR) Le problème décrit par la présente invention est d'améliorer l'efficacité de conversion photoélectrique. La solution selon l'invention porte sur un détecteur de lumière 68 qui comprend : une couche de conversion photoélectrique 44 qui a une première surface principale 44a sur laquelle la lumière pénètre et une seconde surface principale 44b qui fait face à la première surface principale 44a, et qui effectue une conversion photoélectrique sur la lumière; un premier réseau de diffraction 49 qui comprend des pluralités alternées de premières surfaces 45b qui sont formées sur un second côté de surface principale 44b et qui s'étendent comme des bandes dans une première direction D1 et de secondes surfaces 45x qui sont à une hauteur différente des premières surfaces 45b et qui s'étendent comme des bandes dans la première direction D1; des pluralités de fils métalliques 51 qui sont respectivement prévus, à des intervalles, sur les premières surfaces 45b et les secondes surfaces 45x et s'étendent le long de la première direction D1 ou une seconde direction D2 qui est orthogonale à la première direction D1; et un second réseau de diffraction 62 qui est formé au-dessus du premier réseau de diffraction 49 et formant dans celui-ci, à des intervalles, une pluralité de rainures 62a qui s'étendent dans la seconde direction D2.
(JA) 【課題】光電変換効率を高めること。 【解決手段】光が入射する第1の主面44aと、第1の主面44aに相対する第2の主面44bとを有し、光に対して光電変換を行う光電変換層44と、第2の主面44b側に形成され、第1の方向D1にストライプ状に延びる第1の面45bと、第1の面45bと高低差があり、かつ第1の方向D1にストライプ状に延びる第2の面45xとが交互に複数設けられた第1の回折格子49と、第1の面45bと第2の面45xの各々に間隔をおいて複数設けられ、かつ、第1の方向D1と、第1の方向D1に直交する第2の方向D2のいずれかに沿って延びる金属線51と、第1の回折格子49の上に形成され、第2の方向D2に延びる複数の溝62aが間隔をおいて形成された第2の回折格子62とを有する光検知器68による。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)