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|1. (WO2018128079) DRY ETCHING METHOD AND β-DIKETONE-FILLED CONTAINER|
|Applicants:||CENTRAL GLASS COMPANY, LIMITED
|Title:||DRY ETCHING METHOD AND β-DIKETONE-FILLED CONTAINER|
A dry etching method for etching a metal film on a substrate using an etching gas containing an additive gas and a β-diketone, said method characterized in that the metal film includes a metal element capable of forming a complex with the β-diketone, and the amount of water included in the etching gas is 30 ppm by mass or less with respect to the β-diketone. Furthermore, the β-diketone to be used for the dry etching is preferably supplied from a β-diketone-filled airtight container, which is obtained by filling an airtight container with β-diketone, wherein the water content in the airtight container is 15 ppm by weight with respect to the β-diketone. This method makes it possible to etch a metal film while suppressing variations in etching speed, from the initial use to the final use of the filled container.