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1. (WO2018128079) DRY ETCHING METHOD AND β-DIKETONE-FILLED CONTAINER

Pub. No.:    WO/2018/128079    International Application No.:    PCT/JP2017/045709
Publication Date: Fri Jul 13 01:59:59 CEST 2018 International Filing Date: Thu Dec 21 00:59:59 CET 2017
IPC: H01L 21/3065
C23F 1/12
C23F 4/00
H01L 21/302
Applicants: CENTRAL GLASS COMPANY, LIMITED
セントラル硝子株式会社
Inventors: YAMAUCHI, Kunihiro
山内 邦裕
MASUDA, Takashi
増田 隆司
YAO, Akifumi
八尾 章史
Title: DRY ETCHING METHOD AND β-DIKETONE-FILLED CONTAINER
Abstract:
A dry etching method for etching a metal film on a substrate using an etching gas containing an additive gas and a β-diketone, said method characterized in that the metal film includes a metal element capable of forming a complex with the β-diketone, and the amount of water included in the etching gas is 30 ppm by mass or less with respect to the β-diketone. Furthermore, the β-diketone to be used for the dry etching is preferably supplied from a β-diketone-filled airtight container, which is obtained by filling an airtight container with β-diketone, wherein the water content in the airtight container is 15 ppm by weight with respect to the β-diketone. This method makes it possible to etch a metal film while suppressing variations in etching speed, from the initial use to the final use of the filled container.