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1. (WO2018128072) ULTRASONIC TRANSDUCER AND ULTRASONIC IMAGING DEVICE

Pub. No.:    WO/2018/128072    International Application No.:    PCT/JP2017/045408
Publication Date: Fri Jul 13 01:59:59 CEST 2018 International Filing Date: Wed Dec 20 00:59:59 CET 2017
IPC: A61B 8/12
H04R 19/00
Applicants: HITACHI, LTD.
株式会社日立製作所
Inventors: KERTTU, Seppala
ゲルド セパラ
MACHIDA, Shuntaro
町田 俊太郎
TAKEZAKI, Taiichi
竹崎 泰一
Title: ULTRASONIC TRANSDUCER AND ULTRASONIC IMAGING DEVICE
Abstract:
The present invention provides a capacitive micromachined ultrasonic transducer (CMUT) capable of achieving both high frequency vibration of a membrane and low voltage operation. The CMUT has: a lower electrode (12) formed on a substrate (10); a cavity (20) formed between two layers of insulation films (13, 15) disposed on the lower electrode (12); and an upper electrode (16) formed on the insulation film (15) and disposed overlapping with the cavity (20) in a plan view, wherein the upper electrode (16) is provided with: an outer edge portion and a central portion each having a first film thickness; and a groove portion (23) positioned between the outer edge portion and the central portion, and having a second film thickness less than the first film thickness.