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|1. (WO2018128009) FILM FORMING METHOD AND WINDING TYPE FILM FORMING DEVICE|
|Title:||FILM FORMING METHOD AND WINDING TYPE FILM FORMING DEVICE|
In order to suppress deformation of a flexible substrate, this film forming method according to an embodiment of the present invention includes a preliminary process in which a vacuum container is exhausted until the moisture pressure inside the vacuum container reaches a target value or less. Plasma is generated by applying an alternating voltage between a first chrome target and a second chrome target disposed inside the vacuum container. A chrome layer is formed on a film forming surface of a flexible substrate disposed so as to face the first chrome target and the second chrome target.