Search International and National Patent Collections

1. (WO2018128009) FILM FORMING METHOD AND WINDING TYPE FILM FORMING DEVICE

Pub. No.:    WO/2018/128009    International Application No.:    PCT/JP2017/040975
Publication Date: Fri Jul 13 01:59:59 CEST 2018 International Filing Date: Wed Nov 15 00:59:59 CET 2017
IPC: C23C 14/34
C23C 14/14
C23C 14/56
Applicants: ULVAC, INC.
株式会社アルバック
Inventors: HONMA, Hiroaki
本間 裕章
TAKAHASHI, Hirohisa
高橋 明久
HASEGAWA, Masaki
長谷川 正樹
Title: FILM FORMING METHOD AND WINDING TYPE FILM FORMING DEVICE
Abstract:
In order to suppress deformation of a flexible substrate, this film forming method according to an embodiment of the present invention includes a preliminary process in which a vacuum container is exhausted until the moisture pressure inside the vacuum container reaches a target value or less. Plasma is generated by applying an alternating voltage between a first chrome target and a second chrome target disposed inside the vacuum container. A chrome layer is formed on a film forming surface of a flexible substrate disposed so as to face the first chrome target and the second chrome target.