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1. (WO2018127814) WORKPIECE MAGNETIZING SYSTEM AND METHOD OF OPERATING

Pub. No.:    WO/2018/127814    International Application No.:    PCT/IB2018/050045
Publication Date: Fri Jul 13 01:59:59 CEST 2018 International Filing Date: Thu Jan 04 00:59:59 CET 2018
IPC: H01F 13/00
Applicants: TOKYO ELECTRON LIMITED
Inventors: COLGAN, Ian
DOMSA, Ioan
EYRES, George
ISHII, Toru
SAITO, Makoto
HURLEY, David
O'SHAUGHNESSY, Noel
CLARKE, Barry
VAN DER LINDE, Jattie
HUGHES, Pat
Title: WORKPIECE MAGNETIZING SYSTEM AND METHOD OF OPERATING
Abstract:
An apparatus for magnetic annealing one or more workpieces, and a method of operating the apparatus, are described. The apparatus includes: a workpiece holder configured to support one or more workpieces, wherein the one or more workpieces having at least one substantially planar surface; an optional workpiece heating system configured to elevate the one or more workpieces to an anneal temperature; and a magnet assembly having a first magnet and a second magnet, the first and second magnets defining a gap between opposing poles of each magnet, wherein the magnet assembly is arranged to generate a magnetic field substantially perpendicular to the planar surface of the one or more workpieces.