Search International and National Patent Collections
|1. (WO2018127814) WORKPIECE MAGNETIZING SYSTEM AND METHOD OF OPERATING|
|Applicants:||TOKYO ELECTRON LIMITED
VAN DER LINDE, Jattie
|Title:||WORKPIECE MAGNETIZING SYSTEM AND METHOD OF OPERATING|
An apparatus for magnetic annealing one or more workpieces, and a method of operating the apparatus, are described. The apparatus includes: a workpiece holder configured to support one or more workpieces, wherein the one or more workpieces having at least one substantially planar surface; an optional workpiece heating system configured to elevate the one or more workpieces to an anneal temperature; and a magnet assembly having a first magnet and a second magnet, the first and second magnets defining a gap between opposing poles of each magnet, wherein the magnet assembly is arranged to generate a magnetic field substantially perpendicular to the planar surface of the one or more workpieces.