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1. (WO2018125226) TRANSMISSION LINES USING BENDING FINS FROM LOCAL STRESS

Pub. No.:    WO/2018/125226    International Application No.:    PCT/US2016/069538
Publication Date: Fri Jul 06 01:59:59 CEST 2018 International Filing Date: Sat Dec 31 00:59:59 CET 2016
IPC: H01P 3/12
H01P 3/123
Applicants: INTEL CORPORATION
Inventors: RAMASWAMY, Rahul
JAN, Chia-Hong
HAFEZ, Walid
DIAS, Neville
CHANG, Hsu-Yu
OLAC-VAW, Roman W.
LEE, Chen-Guan
Title: TRANSMISSION LINES USING BENDING FINS FROM LOCAL STRESS
Abstract:
Embodiments of the invention include an electromagnetic waveguide and methods of forming electromagnetic waveguides. In an embodiment, the electromagnetic waveguide may include a first semiconductor fin extending up from a substrate and a second semiconductor fin extending up from the substrate. The fins may be bent towards each other so that a centerline of the first semiconductor fin and a centerline of the second semiconductor fin extend from the substrate at a non-orthogonal angle. Accordingly, a cavity may be defined by the first semiconductor fin, the second semiconductor fin, and a top surface of the substrate. Embodiments of the invention may include a metallic layer and a cladding layer lining the surfaces of the cavity. Additional embodiments may include a core formed in the cavity.