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1. (WO2018125201) SYNTHESIS OF POLYCARBOSILANES AND DERIVITIZATION TO HIGH DENSITY SIC FILL MATERIAL

Pub. No.:    WO/2018/125201    International Application No.:    PCT/US2016/069465
Publication Date: Fri Jul 06 01:59:59 CEST 2018 International Filing Date: Sat Dec 31 00:59:59 CET 2016
IPC: H01L 21/20
H01L 21/18
H01L 21/02
H01L 21/768
H01L 21/762
Applicants: INTEL CORPORATION
Inventors: MAHDI, Tayseer
BLACKWELL, James M.
TORRES, Jessica M.
BIELEFELD, Jeffery D.
PLOMBON, John J.
Title: SYNTHESIS OF POLYCARBOSILANES AND DERIVITIZATION TO HIGH DENSITY SIC FILL MATERIAL
Abstract:
A dielectric film, a device including a dielectric film and a method of forming a dielectric film on a integrated circuit substrate wherein the dielectric film includes cross-linked carbosilane units selected from linear monomer units or at least one linear monomer unit and at least one heterocyclic monomer unit, wherein the linear monomer units include a C2 to C8 straight or branched alkenyl or alkynyl and the at least one heterocyclic monomer unit includes a saturated or unsaturated moiety including an even numbered ring structure of alternating silicon and carbon atoms.