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1. (WO2018125157) ACOUSTIC RESONATOR STRUCTURE

Pub. No.:    WO/2018/125157    International Application No.:    PCT/US2016/069289
Publication Date: Fri Jul 06 01:59:59 CEST 2018 International Filing Date: Fri Dec 30 00:59:59 CET 2016
IPC: H03H 3/02
H03H 9/17
H03H 9/60
Applicants: INTEL CORPORATION
FISCHER, Paul
RADOSAVLJEVIC, Marko
DASGUPTA, Sansaptak
THEN, Han Wui
Inventors: FISCHER, Paul
RADOSAVLJEVIC, Marko
DASGUPTA, Sansaptak
THEN, Han Wui
Title: ACOUSTIC RESONATOR STRUCTURE
Abstract:
Modern RF front end filters feature acoustic resonators in a film bulk acoustic resonator (FBAR) structure. An acoustic filter is a circuit that includes at least (and typically significantly more) two resonators. The acoustic resonator structure comprises a substrate including sidewalls and a vertical cavity between the sidewalls and two or more resonators deposited in the vertical cavity.