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1. (WO2018125108) USING NANOTUBES AS A GUIDE FOR SELECTIVE DEPOSITION IN MANUFACTURING INTEGRATED CIRCUIT COMPONENTS

Pub. No.:    WO/2018/125108    International Application No.:    PCT/US2016/069069
Publication Date: Fri Jul 06 01:59:59 CEST 2018 International Filing Date: Fri Dec 30 00:59:59 CET 2016
IPC: H01L 21/02
H01L 29/06
Applicants: INTEL CORPORATION
Inventors: KRYSAK, Marie
HOURANI, Rami
TUFTS, Bruce J.
GSTREIN, Florian
Title: USING NANOTUBES AS A GUIDE FOR SELECTIVE DEPOSITION IN MANUFACTURING INTEGRATED CIRCUIT COMPONENTS
Abstract:
Disclosed herein are methods for manufacturing devices using nanotubes, such as e.g. carbon nanotubes or boron nitride nanotubes, as a guide for selective deposition of materials. For example, in some embodiments, the methods include growing nanotubes on one or more areas on a surface of a substrate which are referred to herein as "nanotube growth areas," followed by depositing one or more materials over or around the nanotubes and then removing either one or more of the deposited material, or the nanotubes. Assemblies and devices manufactured using such methods are disclosed as well. Such assemblies and devices may advantageously be used in semiconductor ICs.