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|1. (WO2018125065) 2-D MATERIAL-BASED NANOMECHANICAL DEVICE|
TORRES, Jessica, M.
|Title:||2-D MATERIAL-BASED NANOMECHANICAL DEVICE|
An apparatus is provided which comprises: a beam disposed in a void disposed above a substrate, the beam having anchored portions at opposite ends, wherein the beam comprises an atomic thick layer of 2-D material, a first conductive region cantilevered into the void from a surface of the substrate and spaced apart from the beam, and first and second gate electrodes disposed adjacent the surface of the substrate and spaced apart on opposite sides of the first conductive region. Other embodiments are also disclosed and claimed.