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1. (WO2018125065) 2-D MATERIAL-BASED NANOMECHANICAL DEVICE

Pub. No.:    WO/2018/125065    International Application No.:    PCT/US2016/068764
Publication Date: Fri Jul 06 01:59:59 CEST 2018 International Filing Date: Wed Dec 28 00:59:59 CET 2016
IPC: H01L 29/06
H01L 21/8238
H01L 21/02
H01L 27/115
H01L 29/16
H01L 27/06
Applicants: INTEL CORPORATION
Inventors: PAWASHE, Chytra
THEOFANIS, Patrick
CAUDILLO, Roman
TORRES, Jessica, M.
Title: 2-D MATERIAL-BASED NANOMECHANICAL DEVICE
Abstract:
An apparatus is provided which comprises: a beam disposed in a void disposed above a substrate, the beam having anchored portions at opposite ends, wherein the beam comprises an atomic thick layer of 2-D material, a first conductive region cantilevered into the void from a surface of the substrate and spaced apart from the beam, and first and second gate electrodes disposed adjacent the surface of the substrate and spaced apart on opposite sides of the first conductive region. Other embodiments are also disclosed and claimed.