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1. (WO2018125027) COUPLING A MAGNET WITH A MEMS DEVICE

Pub. No.:    WO/2018/125027    International Application No.:    PCT/US2016/068635
Publication Date: Fri Jul 06 01:59:59 CEST 2018 International Filing Date: Wed Dec 28 00:59:59 CET 2016
IPC: H01L 43/02
H01L 43/10
H01L 43/08
Applicants: INTEL CORPORATION
Inventors: YAZZIE, Kyle
PRAKASH, Anna M.
RAMALINGAM, Suriyakala
WANG, Liwei
STARKSTON, Robert
CHOUDHURY, Arnab
IYER, Sandeep S.
ABEBAW, Amanuel M.
LABANOK, Nick
Title: COUPLING A MAGNET WITH A MEMS DEVICE
Abstract:
Aspects of the embodiments are directed to coupling a permanent magnet (PM) with a microelectromechanical systems (MEMS) device. In embodiments, an adhesive, such as an epoxy or resin or other adhesive material, can be used to move the PM towards the MEMS device to magnetically couple the PM to the MEMS device. In embodiments, an adhesive that is configured to shrink up on curing can be applied (e.g., using a pick and place tool) to a location between the MEMS device and the PM. As a result of curing, the adhesive can pull the PM towards the MEMS device. In embodiments, an adhesive that is configured to expand as a result of curing can be applied to a location between the PM and a sidewall of the chassis. As a result of curing, the adhesive can push the PM towards the MEMS device. The adhesive can also secure the PM in place.