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1. (WO2018124681) LAMINATED SURFACE DISCHARGE PLASMA GENERATION SOURCE

Pub. No.:    WO/2018/124681    International Application No.:    PCT/KR2017/015445
Publication Date: Fri Jul 06 01:59:59 CEST 2018 International Filing Date: Wed Dec 27 00:59:59 CET 2017
IPC: H05H 1/24
Applicants: KOREA BASIC SCIENCE INSTITUTE
한국기초과학지원연구원
Inventors: JEON, Hyeong Won
전형원
RYU, Seung Min
유승민
EOM, Sang Heum
엄상흠
KIM, Seong Bong
김성봉
YOO, Suk Jae
유석재
Title: LAMINATED SURFACE DISCHARGE PLASMA GENERATION SOURCE
Abstract:
A laminated surface discharge plasma generation source is disclosed. A laminated surface discharge plasma generation source comprises: a base electrode having a fixed surface area; a dielectric layer laminated on the upper side of the base electrode; and a floating electrode module laminated on the upper side of the dielectric layer. The floating electrode module has two or more floating electrodes and one or more dielectric bodies alternately laminated on the upper side of the dielectric layer starting with the floating electrode. A high voltage is applied between the base electrode and a floating electrode positioned on the uppermost layer in the floating electrode module. And when the high voltage is applied, a plasma generation area continues in the direction from the dielectric layer and a lowermost floating electrode coming into contact with the dielectric layer to the uppermost floating electrode.