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1. (WO2018124600) WAFER SUPPORT COMPRISING ROTATING SHAFT
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Pub. No.: WO/2018/124600 International Application No.: PCT/KR2017/015085
Publication Date: 05.07.2018 International Filing Date: 20.12.2017
IPC:
H01L 21/687 (2006.01) ,H01L 21/683 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
683
for supporting or gripping
687
using mechanical means, e.g. chucks, clamps or pinches
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
683
for supporting or gripping
Applicants:
에스케이실트론 주식회사 SK SILTRON CO., LTD. [KR/KR]; 경상북도 구미시 임수로 53 53 Imsu-ro Gumi-si Gyeongsangbuk-do 39386, KR
Inventors:
금연욱 KEUM, Yeon Wook; KR
김철수 KIM, Cheol Soo; KR
Agent:
이승찬 LEE, Seung Chan; KR
Priority Data:
10-2016-017889226.12.2016KR
Title (EN) WAFER SUPPORT COMPRISING ROTATING SHAFT
(FR) SUPPORT DE PLAQUETTE COMPRENANT UN ARBRE ROTATIF
(KO) 회전 샤프트를 포함하는 웨이퍼 지지대
Abstract:
(EN) The present invention relates to a rotating shaft of a wafer support. The wafer support according to an embodiment of the present invention comprises: a wafer plate on which a wafer is placed; a rotating shaft for rotating the wafer plate; a cylindrical guide disposed at an outer side of a side surface of the rotating shaft; and a ball bearing between the cylindrical guide and the rotating shaft for supporting the rotating shaft.
(FR) La présente invention concerne un arbre rotatif d'un support de plaquette. Le support de plaquette selon un mode de réalisation de la présente invention comprend : une plaque à plaquette sur laquelle est placée une plaquette ; un arbre rotatif pour faire tourner la plaque à plaquette ; un guide cylindrique disposé au niveau d'un côté extérieur d'une surface latérale de l'arbre rotatif ; et un roulement à billes entre le guide cylindrique et l'arbre rotatif pour supporter l'arbre rotatif.
(KO) 본 발명은 웨이퍼 지지대의 회전 샤프트에 관한 것이다. 본 발명의 일 실시예에 따른 웨이퍼 지지대는, 웨이퍼(wafer)가 위치하는 웨이퍼 플레이트(wafer plate); 웨이퍼 플레이트를 회전시키는 회전 샤프트(shaft); 회전 샤프트의 옆면의 외곽에 배치되는 원통형 가이드(guide); 및 원통형 가이드와 회전 샤프트 사이에서 회전 샤프트를 지지하는 볼 베어링(ball bearing); 를 포함할 수 있다.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Korean (KO)
Filing Language: Korean (KO)