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1. (WO2018123898) ANTI-REFLECTION FILM AND DEEP ULTRAVIOLET LIGHT EMITTING DEVICE

Pub. No.:    WO/2018/123898    International Application No.:    PCT/JP2017/046217
Publication Date: Fri Jul 06 01:59:59 CEST 2018 International Filing Date: Sat Dec 23 00:59:59 CET 2017
IPC: G02B 1/115
H01L 33/60
Applicants: DOWA ELECTRONICS MATERIALS CO., LTD.
DOWAエレクトロニクス株式会社
Inventors: MARUYAMA Tsukasa
丸山 司
Title: ANTI-REFLECTION FILM AND DEEP ULTRAVIOLET LIGHT EMITTING DEVICE
Abstract:
Provided is an anti-reflection film which exhibits excellent moisture resistance, while having low reflectance even with respect to oblique incidence of deep ultraviolet light, and which is suitable for use in deep ultraviolet light emitting devices. An anti-reflection film according to the present invention is provided with a first layer having a first refractive index, a second layer having a second refractive index and a third layer having a third refractive index, said layers being disposed on a window material. At a wavelength of 280 nm, the first refractive index is from 1.6 to 2.0 (inclusive), the second refractive index is from 2.0 to 2.7 (inclusive) and is higher than the first refractive index, and the third refractive index is from 1.3 to 1.6 (inclusive) and is lower than the first refractive index. The materials constituting the first refractive index, the second refractive index and the third refractive index are configured from oxides that are different from each other.