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|1. (WO2018123852) PIEZOELECTRIC-ELEMENT-DRIVEN VALVE AND FLOW RATE CONTROL DEVICE|
|Title:||PIEZOELECTRIC-ELEMENT-DRIVEN VALVE AND FLOW RATE CONTROL DEVICE|
[Solution] This piezoelectric-element-driven valve is provided with a valve seat provided on a flow channel, a valve body that separates from/sits on the valve seat, and a piezoelectric element, and is configured so that the valve body is moved by the extension of the piezoelectric element. The piezoelectric-element-driven valve also is provided with a detection mechanism for detecting the amount by which the piezoelectric element extends, the detection mechanism including a distortion sensor, and the movement amount of the valve body being detectable from the output of the distortion sensor.