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1. (WO2018123852) PIEZOELECTRIC-ELEMENT-DRIVEN VALVE AND FLOW RATE CONTROL DEVICE

Pub. No.:    WO/2018/123852    International Application No.:    PCT/JP2017/046094
Publication Date: Fri Jul 06 01:59:59 CEST 2018 International Filing Date: Sat Dec 23 00:59:59 CET 2017
IPC: F16K 31/02
F16K 37/00
G05D 7/06
Applicants: FUJIKIN INCORPORATED
株式会社フジキン
Inventors: DOHI Ryousuke
土肥 亮介
HIRATA Kaoru
平田 薫
SUGITA Katsuyuki
杉田 勝幸
KAWADA Koji
川田 幸司
NISHINO Kouji
西野 功二
IKEDA Nobukazu
池田 信一
Title: PIEZOELECTRIC-ELEMENT-DRIVEN VALVE AND FLOW RATE CONTROL DEVICE
Abstract:
[Solution] This piezoelectric-element-driven valve is provided with a valve seat provided on a flow channel, a valve body that separates from/sits on the valve seat, and a piezoelectric element, and is configured so that the valve body is moved by the extension of the piezoelectric element. The piezoelectric-element-driven valve also is provided with a detection mechanism for detecting the amount by which the piezoelectric element extends, the detection mechanism including a distortion sensor, and the movement amount of the valve body being detectable from the output of the distortion sensor.