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1. (WO2018123537) RADIATION SENSITIVE COMPOSITION, PATTERN FORMING METHOD AND METAL OXIDE

Pub. No.:    WO/2018/123537    International Application No.:    PCT/JP2017/044367
Publication Date: Fri Jul 06 01:59:59 CEST 2018 International Filing Date: Tue Dec 12 00:59:59 CET 2017
IPC: G03F 7/038
Applicants: JSR CORPORATION
JSR株式会社
Inventors: MINEGISHI Shinya
峯岸 信也
SHIRATANI Motohiro
白谷 宗大
ASANO Yusuke
浅野 裕介
NAKAGAWA Hisashi
中川 恭志
NARUOKA Takehiko
成岡 岳彦
Title: RADIATION SENSITIVE COMPOSITION, PATTERN FORMING METHOD AND METAL OXIDE
Abstract:
The purpose of the present invention is to provide a radiation sensitive composition which has excellent sensitivity. The present invention is a radiation sensitive composition which contains a metal oxide having a structural unit represented by formula (1) and a solvent. In formula (1), M represents a germanium, tin or lead; and R1 represents a monovalent organic group having 30 or less carbon atoms, which contains at least one group selected from among groups having an unsaturated bond and electron-withdrawing groups, and which is bonded to M by means of a carbon atom. It is preferable that the monovalent organic group represented by R1 contains a group having an unsaturated bond, and the group having an unsaturated bond is at least one group selected from among aromatic groups and ethylenic double bond-containing groups. It is also preferable that the monovalent organic group represented by R1 contains an electron-withdrawing group, and the electron-withdrawing group is at least one group selected from among a cyano group, a nitro group, halogenated alkyl groups, -COO- and cationic groups. The content of the metal oxide in terms of solid content is preferably 50% by mass or more.