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1. (WO2018123462) PATTERN MANUFACTURING METHOD, COLOR FILTER MANUFACTURING METHOD, METHOD OF MANUFACTURING SOLD STATE IMAGING ELEMENT, AND METHOD OF MANUFACTURING IMAGE DISPLAY DEVICE

Pub. No.:    WO/2018/123462    International Application No.:    PCT/JP2017/043592
Publication Date: Fri Jul 06 01:59:59 CEST 2018 International Filing Date: Wed Dec 06 00:59:59 CET 2017
IPC: G03F 7/004
G02B 5/20
G02F 1/1335
G03F 7/20
Applicants: FUJIFILM CORPORATION
富士フイルム株式会社
Inventors: YOSHIBAYASHI Mitsuji
吉林 光司
Title: PATTERN MANUFACTURING METHOD, COLOR FILTER MANUFACTURING METHOD, METHOD OF MANUFACTURING SOLD STATE IMAGING ELEMENT, AND METHOD OF MANUFACTURING IMAGE DISPLAY DEVICE
Abstract:
Provided are a pattern manufacturing method having a wide process window, a color filter manufacturing method, a method of manufacturing a solid-state imaging element, and a method of manufacturing an image display device. The pattern manufacturing method includes the steps of: utilizing a negative photosensitive composition and forming a negative photosensitive composition layer on a support medium; exposing the negative photosensitive composition layer via a mask having a pattern; and developing the negative photosensitive composition layer after removing an unexposed portion thereof. The optical density of the mask to light of a wavelength used for exposure is 3.6 or greater.