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1. (WO2018123126) LIQUID COMPOSITION FOR FILM FORMATION AND METHOD FOR PRODUCING SAME

Pub. No.:    WO/2018/123126    International Application No.:    PCT/JP2017/028704
Publication Date: Fri Jul 06 01:59:59 CEST 2018 International Filing Date: Wed Aug 09 01:59:59 CEST 2017
IPC: C09D 183/00
C08G 77/26
C09D 7/12
C09K 3/18
Applicants: MITSUBISHI MATERIALS ELECTRONIC CHEMICALS CO., LTD.
三菱マテリアル電子化成株式会社
Inventors: SHIRAISHI, Shinya
白石 真也
SAITO, Tomoya
齋藤 禎也
Title: LIQUID COMPOSITION FOR FILM FORMATION AND METHOD FOR PRODUCING SAME
Abstract:
This liquid composition for film formation contains a solvent and a component that is mainly composed of a silica sol-gel. If the silica sol-gel is taken as 100% by mass, the silica sol-gel contains 0.5-10% by mass of a fluorine-containing functional group component (F) that has a perfluoroamine structure represented by general formula (1) and 0.5-20% by mass of an alkyl group component (G) that has 2-7 carbon atoms. The solvent is a mixed solvent of water and an alcohol having 1-4 carbon atoms, or alternatively, a mixed solvent of water, an alcohol having 1-4 carbon atoms and an organic solvent other than the alcohol.