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1. (WO2018123118) RESONANCE DEVICE

Pub. No.:    WO/2018/123118    International Application No.:    PCT/JP2017/025603
Publication Date: Fri Jul 06 01:59:59 CEST 2018 International Filing Date: Fri Jul 14 01:59:59 CEST 2017
IPC: H03H 9/02
H03H 9/24
Applicants: MURATA MANUFACTURING CO., LTD.
株式会社村田製作所
Inventors: UNAMI, Toshihiko
宇波 俊彦
NISHIMURA, Toshio
西村 俊雄
Title: RESONANCE DEVICE
Abstract:
The purpose of the present invention is to enhance the accuracy of temperature control in a resonance device. The present invention is provided with: a resonator having a platform, a vibrating section, and at least one first holding arm for connecting the vibrating section and the platform in such a manner that a first groove is provided around the vibrating section; a sensor unit having a measurement unit for measuring temperature; and a heater formed on the platform, wherein a second groove is provided between the measurement unit and the heater.