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1. (WO2018123035) TARGET PHOTOGRAPHING APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

Pub. No.:    WO/2018/123035    International Application No.:    PCT/JP2016/089153
Publication Date: Fri Jul 06 01:59:59 CEST 2018 International Filing Date: Thu Dec 29 00:59:59 CET 2016
IPC: G03F 7/20
Applicants: GIGAPHOTON INC.
ギガフォトン株式会社
Inventors: HOSODA, Hirokazu
細田 裕計
Title: TARGET PHOTOGRAPHING APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
Abstract:
A target photographing apparatus according to one aspect of the present invention is provided with: a delay circuit that receives a timing signal from the outside, and outputs a first trigger signal at a timing delayed from the time of receiving the timing signal by a first delay time; an illumination light source that emits light on the basis of the first trigger signal; a photographing unit that is arranged so as to photograph an image of the shadow of a target through irradiation of the target to be observed with the light emitted from the illumination light source; a processing unit that carries out image processing including a process for measuring background luminance from the image photographed by the photographing unit; and a control unit that executes control for adjusting the first delay time on the basis of the background luminance.