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1. (WO2018122962) OPERATION INFORMATION MONITORING SYSTEM FOR SUBSTRATE PRODUCTION LINES

Pub. No.:    WO/2018/122962    International Application No.:    PCT/JP2016/088898
Publication Date: Fri Jul 06 01:59:59 CEST 2018 International Filing Date: Wed Dec 28 00:59:59 CET 2016
IPC: G06Q 10/00
Applicants: FUJI CORPORATION
株式会社FUJI
Inventors: MORITA Yukitoshi
森田 幸寿
Title: OPERATION INFORMATION MONITORING SYSTEM FOR SUBSTRATE PRODUCTION LINES
Abstract:
An operation information monitoring system (1) for substrate production lines is provided with: a plurality of site aggregation units (2) which are provided respectively at a plurality of production sites (9), and which each aggregate operation information about substrate production lines (911, 912, 913), thereby creating site information; a plurality of information transmission units (3) which are provided to correspond respectively to the plurality of production sites, and which each transmit the site information created by the respective site aggregation unit; a total aggregation unit (4) which aggregates the site information received from the plurality of information transmission units, and creates total information, which is an aggregation of the operation information about all substrate production lines at all production sites; and an area comparison output unit (5) which divides all production sites into site groups located in different areas, determines a measure relating to operation information about each area on the basis of the site information and/or the total information, and outputs these determined measures.