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1. (WO2018122698) HIGH ACCURACY PRESSURE TRANSDUCER WITH IMPROVED TEMPERATURE STABILITY

Pub. No.:    WO/2018/122698    International Application No.:    PCT/IB2017/058276
Publication Date: Fri Jul 06 01:59:59 CEST 2018 International Filing Date: Fri Dec 22 00:59:59 CET 2017
IPC: G01L 9/12
G01L 1/14
G01L 9/00
Applicants: TUBITAK
Inventors: KANGI, Rıfat
Title: HIGH ACCURACY PRESSURE TRANSDUCER WITH IMPROVED TEMPERATURE STABILITY
Abstract:
The invention relates to a high accuracy capacitive pressure transducer with improved thermal properties capable of performing measurements at a fixed temperature, with stability better than ± 2mK, in the temperature range of 15°C- 30°C-, and which does not require the use of correction for thermal transpiration effect.