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1. (WO2018122603) ZIRCONIUM, HAFNIUM, TITANIUM PRECURSORS AND DEPOSITION OF GROUP 4 CONTAINING FILMS USING THE SAME

Pub. No.:    WO/2018/122603    International Application No.:    PCT/IB2017/001658
Publication Date: Fri Jul 06 01:59:59 CEST 2018 International Filing Date: Fri Dec 15 00:59:59 CET 2017
IPC: C23C 16/455
C04B 35/622
C07F 17/00
C23C 16/50
C23C 16/06
Applicants: L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE
GATINEAU, Satoko
NOH, Wontae
KIM, Daehyeon
GATINEAU, Julie
GIRARD, Jean-Marc
Inventors: GATINEAU, Satoko
NOH, Wontae
KIM, Daehyeon
GATINEAU, Julie
GIRARD, Jean-Marc
Title: ZIRCONIUM, HAFNIUM, TITANIUM PRECURSORS AND DEPOSITION OF GROUP 4 CONTAINING FILMS USING THE SAME
Abstract:
Group 4 transition metal-containing film forming compositions are disclosed comprising Group 4 transition metal precursors having the formula: L2-M-C4AR3-3-[(ER2)m-(ER2)n-L']-, L2-M-(C3(m-A2)R2-4-[(ER2)m- (ER2)n-L']-, L2-M-(C5AR4-4-[(ER2)m-(ER2)n-L'], and L2-M-(C4(m- A2)R3-4-[(ER2)m-(ER2)n-L']-, wherein M is Ti, Zr, or Hf; each A is independently N, Si, B or P; each E is independently C, Si, B or P; m and n is independently 0, 1 or 2; m + n >1; each R is independently a H or a C1-C4 hydrocarbon group; each L is independently a -1 anionic ligand selected from the group consisting of NR'2, OR', Cp, amidinate, β- diketonate, or keto-iminate, wherein R' is a H or a C1-C4 hydrocarbon group; and L' is NR" or O, wherein R' is a H or a C1-C4 hydrocarbon group. Also disclosed are methods of synthesizing and using the disclosed precursors to deposit Group 4 transition metal-containing films on one or more substrates via vapor deposition processes.