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1. (WO2018122110) COMPOSITION FOR CLEANING AND PREVENTING DEPOSITS IN COATING NOZZLES FOR METAL OXIDE PRECURSORS WHICH CAN BE PROCESSED IN SOLUTION

Pub. No.:    WO/2018/122110    International Application No.:    PCT/EP2017/084174
Publication Date: Fri Jul 06 01:59:59 CEST 2018 International Filing Date: Fri Dec 22 00:59:59 CET 2017
IPC: C23C 18/12
B05D 1/00
Applicants: EVONIK DEGUSSA GMBH
Inventors: WEBER, Dennis
MERKULOV, Alexey
Title: COMPOSITION FOR CLEANING AND PREVENTING DEPOSITS IN COATING NOZZLES FOR METAL OXIDE PRECURSORS WHICH CAN BE PROCESSED IN SOLUTION
Abstract:
The invention relates to a nozzle coating method for deposition of metal-alkoxides and/or metal-oxo-alkoxides, characterized in that the nozzle is immersed before and/or after the coating method in a solvent containing at least 25 wt% acetylacetone. The invention further relates to the use of a solvent containing at least 25 wt% acetylacetone for preventing deposits due to metal-alkoxides and/or metal-oxo-alkoxides in coating nozzles. The invention further relates to the use of a solvent containing at least 25 wt% acetyleacetone for dissolution of deposits due to metal-alkoxides and/or metal-oxo-alkoxides in coating nozzles.