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1. (WO2018122028) MULTI-IMAGE PARTICLE DETECTION SYSTEM AND METHOD
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Pub. No.: WO/2018/122028 International Application No.: PCT/EP2017/083432
Publication Date: 05.07.2018 International Filing Date: 19.12.2017
IPC:
G03F 1/62 (2012.01) ,G03F 1/84 (2012.01) ,G01N 21/88 (2006.01) ,G01N 21/94 (2006.01) ,G06T 7/00 (2017.01)
G PHYSICS
03
PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
1
Originals for photomechanical production of textured or patterned surfaces, e.g. masks, photo-masks or reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
62
Pellicles or pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
G PHYSICS
03
PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
1
Originals for photomechanical production of textured or patterned surfaces, e.g. masks, photo-masks or reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
68
Preparation processes not covered by groups G03F1/20-G03F1/5096
82
Auxiliary processes, e.g. cleaning
84
Inspecting
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21
Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light
84
Systems specially adapted for particular applications
88
Investigating the presence of flaws, defects or contamination
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21
Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light
84
Systems specially adapted for particular applications
88
Investigating the presence of flaws, defects or contamination
94
Investigating contamination, e.g. dust
G PHYSICS
06
COMPUTING; CALCULATING; COUNTING
T
IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
7
Image analysis, e.g. from bit-mapped to non bit-mapped
Applicants:
ASML HOLDING N.V. [NL/NL]; P.O. Box 324 5500 AH Veldhoven, NL
Inventors:
BENDIKSEN, Aage; US
OU, Guobin; US
KOCHANSKI, Michael, Christopher; US
NELSON, Michael, Leo; US
Agent:
SLENDERS, Peter; NL
Priority Data:
62/439,66928.12.2016US
Title (EN) MULTI-IMAGE PARTICLE DETECTION SYSTEM AND METHOD
(FR) SYSTÈME ET PROCÉDÉ DE DÉTECTION DE PARTICULES MULTI-IMAGE
Abstract:
(EN) A method including: obtaining a first image location for an image feature of a first image of at least part of an object surface, obtaining a second image location for an image feature in a second image of at least part of the object surface, and/or obtaining a value of the displacement between the first and second image locations, the first and second images obtained at different relative positions between an image surface of a detector and the object surface in a direction substantially parallel to the image surface and/or the object surface; and determining, by a computer system, that a physical feature is at an inspection surface or not at the inspection surface, based on an analysis of the second image location and/or the displacement value and on an anticipated image feature location of the image feature in the second image relative to the first image location.
(FR) L’invention concerne un procédé qui consiste : à obtenir un premier emplacement d'image pour une caractéristique d'image d'une première image d'au moins une partie d'une surface d'objet, à obtenir un second emplacement d'image pour une caractéristique d'image dans une seconde image d'au moins une partie de la surface d'objet, et/ou à obtenir une valeur du déplacement entre les premier et second emplacements d'image, les première et seconde images obtenues à différentes positions relatives entre une surface d'image d'un détecteur et la surface d'objet dans une direction sensiblement parallèle à la surface d'image et/ou à la surface d'objet ; à déterminer, au moyen d'un système informatique, qu'une caractéristique physique se trouve au niveau d'une surface d'inspection ou qu’elle ne se trouve pas au niveau de la surface d'inspection, sur la base d'une analyse du second emplacement d'image et/ou sur la base de la valeur de déplacement et d'un emplacement de caractéristique d'image anticipé de la caractéristique d'image dans la seconde image par rapport au premier emplacement d'image.
front page image
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)