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1. (WO2018121988) METHODS OF GUIDING PROCESS MODELS AND INSPECTION IN A MANUFACTURING PROCESS

Pub. No.:    WO/2018/121988    International Application No.:    PCT/EP2017/082524
Publication Date: Fri Jul 06 01:59:59 CEST 2018 International Filing Date: Thu Dec 14 00:59:59 CET 2017
IPC: G03F 7/20
G05B 13/00
G06T 7/00
H01L 21/66
Applicants: ASML NETHERLANDS B.V.
Inventors: CAO, Yu
ZOU, Yi
LIN, Chenxi
Title: METHODS OF GUIDING PROCESS MODELS AND INSPECTION IN A MANUFACTURING PROCESS
Abstract:
A method where deviations of a characteristic of an image simulated by two different process models or deviations of the characteristic simulated by a process model and measured by a metrology tool, are used for various purposes such as to reduce the calibration time, improve the accuracy of the model, and improve the overall manufacturing process.