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1. (WO2018121987) METROLOGY TOOL AND METHOD OF USING THE SAME

Pub. No.:    WO/2018/121987    International Application No.:    PCT/EP2017/082519
Publication Date: Fri Jul 06 01:59:59 CEST 2018 International Filing Date: Thu Dec 14 00:59:59 CET 2017
IPC: G03F 9/00
Applicants: ASML HOLDING N.V.
Inventors: KREUZER, Justin, Lloyd
Title: METROLOGY TOOL AND METHOD OF USING THE SAME
Abstract:
A method including: subsequent to a first device lithographic step of a device patterning process, measuring a degraded metrology mark on an object and/or a device pattern feature associated with the degraded metrology mark, the degraded metrology mark arising at least in part from the first device lithographic step on the object; and prior to a second device lithographic step of the device patterning process on the object, creating a replacement metrology mark, for use in the patterning process in place of the degraded metrology mark, on the object.