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1. (WO2018121967) METHODS OF DETERMINING SCATTERING OF RADIATION BY STRUCTURES OF FINITE THICKNESSES ON A PATTERNING DEVICE

Pub. No.:    WO/2018/121967    International Application No.:    PCT/EP2017/081744
Publication Date: Fri Jul 06 01:59:59 CEST 2018 International Filing Date: Thu Dec 07 00:59:59 CET 2017
IPC: G03F 7/20
G03F 1/36
Applicants: ASML NETHERLANDS B.V.
Inventors: CAO, Yu
LU, Yen-Wen
LIU, Peng
HOWELL, Rafael C.
BISWAS, Roshni
Title: METHODS OF DETERMINING SCATTERING OF RADIATION BY STRUCTURES OF FINITE THICKNESSES ON A PATTERNING DEVICE
Abstract:
A method including: obtaining a thin-mask transmission function of a patterning device and a M3D model for a lithographic process, wherein the thin-mask transmission function is a continuous transmission mask (CTM) and the M3D model at least represents a portion of M3D attributable to multiple edges of structures on the patterning device; determining a M3D mask transmission function of the patterning device by using the thin-mask transmission function and the M3D model; and determining an aerial image produced by the patterning device and the lithographic process, by using the M3D mask transmission function.