Search International and National Patent Collections

1. (WO2018121897) VACUUM PLASMA WORKPIECE TREATMENT APPARATUS. PR1610

Pub. No.:    WO/2018/121897    International Application No.:    PCT/EP2017/076505
Publication Date: Fri Jul 06 01:59:59 CEST 2018 International Filing Date: Wed Oct 18 01:59:59 CEST 2017
IPC: H01J 37/32
C23C 16/44
C23C 16/455
C23C 16/458
Applicants: EVATEC AG
Inventors: WEICHART, Jürgen
WEICHART, Johannes
Title: VACUUM PLASMA WORKPIECE TREATMENT APPARATUS. PR1610
Abstract:
In a plasma reactor (1), a pumping compartment (5) is separate from a plasma-treating compartment (7) by a structure which comprises a central frame (57). The frame is suspended to the casing (3) of the reactor via spokes (12). The spokes allow free expansion and contraction of the frame under thermal loading. The slits between the spokes do not allow plasma ignition there and provide for a small flow resistance between the treatment compartment and the pumping compartment. The frame may act as a downholding member for a substrate (47) on the smaller electrode (45).