Some content of this application is unavailable at the moment.
If this situation persist, please contact us atFeedback&Contact
1. (WO2018121196) MASK FRAME ASSEMBLY AND EVAPORATION DEVICE
Latest bibliographic data on file with the International Bureau    Submit observation

Pub. No.: WO/2018/121196 International Application No.: PCT/CN2017/114784
Publication Date: 05.07.2018 International Filing Date: 06.12.2017
IPC:
C23C 14/04 (2006.01) ,C23C 14/24 (2006.01) ,C23C 14/12 (2006.01)
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
04
Coating on selected surface areas, e.g. using masks
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
24
Vacuum evaporation
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
06
characterised by the coating material
12
Organic material
Applicants:
京东方科技集团股份有限公司 BOE TECHNOLOGY GROUP CO., LTD. [CN/CN]; 中国北京市 朝阳区酒仙桥路10号 No. 10 Jiuxianqiao Road, Chaoyang District Beijing 100015, CN
鄂尔多斯市源盛光电有限责任公司 ORDOS YUANSHENG OPTOELECTRONICS CO., LTD. [CN/CN]; 中国内蒙古自治区鄂尔多斯市 东胜区鄂尔多斯装备制造基地 Ordos Equipment Manufacturing Base Dongsheng District Ordos, Inner Mongolia 017020, CN
Inventors:
林治明 LIN, Zhiming; CN
王震 WANG, Zhen; CN
张健 ZHANG, Jian; CN
Agent:
北京市柳沈律师事务所 LIU, SHEN & ASSOCIATES; 中国北京市 海淀区彩和坊路10号1号楼10层 10th Floor, Building 1 10 Caihefang Road, Haidian District Beijing 100080, CN
Priority Data:
201611243248.628.12.2016CN
Title (EN) MASK FRAME ASSEMBLY AND EVAPORATION DEVICE
(FR) ENSEMBLE CADRE DE MASQUE ET DISPOSITIF D'ÉVAPORATION
(ZH) 掩膜集成框架及蒸镀装置
Abstract:
(EN) Disclosed is a mask frame assembly (7), comprising: a hollow frame (10) provided with a hollow region (X); and a first support bar (30) provided across the hollow region (X) of the hollow frame (10) in a first direction (I). The mask frame assembly (7) supports a fine metal mask (20) comprising a mask pattern region (C) and unused mask regions (D, D') surrounding the mask pattern region. When the fine metal mask (20) is supported by the mask frame assembly (7), two opposite ends of the fine metal mask (20) are fixed on the hollow frame (10) in a second direction (J), the mask pattern region (C) of the fine metal mask (20) is disposed in the hollow region (X) of the hollow frame (10), and the projection of the first support bar (30) on the fine metal mask (20) is located in the unused mask regions (D, D'). Further disclosed is an evaporation device.
(FR) L'invention concerne un ensemble cadre de masque (7), comprenant : un cadre creux (10) pourvu d'une région creuse (X) ; et une première barre de support (30) disposée sur l'ensemble de la région creuse (X) du cadre creux (10) dans une première direction (I). L'ensemble cadre de masque (7) soutient un masque métallique fin (20) comprenant une région de motif de masque (C) et des régions de masque non utilisées (D, D') entourant la région de motif de masque. Lorsque le masque métallique fin (20) est soutenu par l'ensemble cadre de masque (7), deux extrémités opposées du masque métallique fin (20) sont fixées sur le cadre creux (10) dans une seconde direction (J), la région de motif de masque (C) du masque métallique fin (20) est disposée dans la région creuse (X) du cadre creux (10), et la projection de la première barre de support (30) sur le masque métallique fin (20) est située dans les régions de masque non utilisées (D, D'). L'invention concerne également un dispositif d'évaporation.
(ZH) 一种掩膜集成框架(7),其包括:中空框架(10),中空框架(10)设置有中空区域(X);以及第一支撑条(30),沿第一方向(I)跨设于中空框架(10)的中空区域(X);其中,掩模集成框架(7)操作为支撑精细金属掩膜版(20),精细金属掩膜版(20)包括掩膜图案区(C)以及包围掩膜图案区的无效掩膜区(D,D'),在精细金属掩膜版(20)被掩膜集成框架(7)被支撑的状态下,精细金属掩膜版(20)相对的两端沿第二方向(J)固定在中空框架(10)上,精细金属掩膜版(20)的掩膜图案区(C)设置于中空框架(10)的中空区域(X),第一支撑条(30)在精细金属掩膜版(20)上的投影位于的无效掩膜区(D,D')内。还公开了一种蒸镀装置。
front page image
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Chinese (ZH)
Filing Language: Chinese (ZH)