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1. (WO2018121141) METHOD FOR ADDING AUXILIARY GRAPH

Pub. No.:    WO/2018/121141    International Application No.:    PCT/CN2017/112496
Publication Date: Fri Jul 06 01:59:59 CEST 2018 International Filing Date: Fri Nov 24 00:59:59 CET 2017
IPC: G03F 1/36
Applicants: SHANGHAI IC R & D CENTER CO., LTD.
上海集成电路研发中心有限公司
Inventors: HU, Hongmei
胡红梅
Title: METHOD FOR ADDING AUXILIARY GRAPH
Abstract:
A method for adding an auxiliary graph comprises: providing an OPC target graph, selecting a rule of adding only one auxiliary graph part according to an auxiliary graph benchmark rule, and establishing an additional rule of the auxiliary graph; amplifying the whole target graph, so as to expand all edges of the target graph outwards by a distance A; subtracting, according to the additional rule of the auxiliary graph, 2A from a distance value between corresponding target graphs in the additional rule of the auxiliary graph; correspondingly adjusting, according to the distance A, other parameters affected by amplification of the whole target graph in the additional rule of the auxiliary graph; operating the additional rule of the auxiliary graph to generate a first auxiliary graph; executing the auxiliary graph benchmark rule on the target graph by using the first auxiliary graph as a newly-added reference graph, so as to generate a second auxiliary graph; and superposing the first auxiliary graph, the second auxiliary graph and other existing auxiliary graphs to form a final auxiliary graph.