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1. (WO2018120381) HIGH-FREQUENCY INDUCED EVAPORATION SOURCE APPARATUS
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Pub. No.: WO/2018/120381 International Application No.: PCT/CN2017/073879
Publication Date: 05.07.2018 International Filing Date: 17.02.2017
IPC:
C23C 14/26 (2006.01)
C CHEMISTRY; METALLURGY
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COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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characterised by the process of coating
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Vacuum evaporation
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by resistance or inductive heating of the source
Applicants:
武汉华星光电技术有限公司 WUHAN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD. [CN/CN]; 中国湖北省武汉市 东湖开发区高新大道666号生物城C5栋 Building C5,Biolake of Optics Valley,No.666 Gaoxin Avenue,Wuhan East Lake High-tech Development Zone Wuhan, Hubei 430070, CN
Inventors:
沐俊应 MU, Junying; CN
Agent:
深圳市德力知识产权代理事务所 COMIPS INTELLECTUAL PROPERTY OFFICE; 中国广东省深圳市 福田区上步中路深勘大厦15E Room 15E, Shenkan Building, Shangbu Zhong Road, Futian District Shenzhen, Guangdong 518028, CN
Priority Data:
201611233960.828.12.2016CN
Title (EN) HIGH-FREQUENCY INDUCED EVAPORATION SOURCE APPARATUS
(FR) APPAREIL DE SOURCE D'ÉVAPORATION INDUITE À HAUTE FRÉQUENCE
(ZH) 高频感应蒸发源装置
Abstract:
(EN) Provided is a high-frequency induced evaporation source apparatus, comprising an internal crucible (1) for carrying an evaporation material, an induction coil (2) sleeved around the inner crucible (1), a radio frequency generator (3) connected to the induction coil (2), and a radio frequency induction heating component (6) provided inside the internal crucible (1), the induction coil (2) being used to receive an alternating current transmitted by the radio frequency generator (3) to generate an induced magnetic field, and the radio frequency induction heating component (6) comprising an electrically conductive induction core (61) that generates an induction current in the induced magnetic field of the induction coil (2) and generates heat, thereby heating the evaporation material. The evaporation source apparatus can effectively avoid the problem of cracking of an evaporation material due to uneven local heating rates and local overheating.
(FR) L'invention concerne un appareil de source d'évaporation induite à haute fréquence, comprenant un creuset interne (1) destiné à transporter un matériau d'évaporation, une bobine d'induction (2) emmanchée autour du creuset interne (1), un générateur de radiofréquence (3) connecté à la bobine d'induction (2), et un composant de chauffage par induction radiofréquence (6) disposé à l'intérieur du creuset interne (1), la bobine d'induction (2) étant utilisée pour recevoir un courant alternatif transmis par le générateur de radiofréquence (3) pour générer un champ magnétique induit, et le composant de chauffage par induction radiofréquence (6) comprenant un noyau d'induction électroconducteur (61) qui génère un courant d'induction dans le champ magnétique induit de la bobine d'induction (2) et qui génère de la chaleur, ce qui permet de chauffer le matériau d'évaporation. L'appareil de source d'évaporation peut éviter efficacement le problème de fissuration d'un matériau d'évaporation causé par des vitesses de chauffage locales inégales et une surchauffe locale.
(ZH) 一种高频感应蒸发源装置,包括用于承载蒸发材料的内坩埚(1)、套设于内坩埚(1)外围的感应线圈(2)、与感应线圈(2)连接的射频发生器(3)、及设于内坩埚(1)内的射频诱导加热部件(6);感应线圈(2)用于接收射频发生器(3)发射的交变电流而产生感应磁场;射频诱导加热部件(6)包括具有导电性的感应内核体(61),感应内核体(61)在感应线圈(2)的感应磁场中产生感应电流并生成热量,从而对蒸发材料进行加热。该蒸发源装置能有效避免蒸发材料局部加热速率不均匀及局部过加热而裂化的问题。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Chinese (ZH)
Filing Language: Chinese (ZH)