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1. (WO2018119513) OPTICALLY ADDRESSED, THERMIONIC ELECTRON BEAM DEVICE
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Pub. No.: WO/2018/119513 International Application No.: PCT/CA2017/051523
Publication Date: 05.07.2018 International Filing Date: 15.12.2017
IPC:
H01J 33/00 (2006.01) ,H01J 33/02 (2006.01) ,H01J 33/04 (2006.01) ,H01J 37/075 (2006.01) ,H01J 37/20 (2006.01) ,H01J 37/28 (2006.01) ,H01J 37/29 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
33
Discharge tubes with provision for emergence of electrons or ions from the vessel; Lenard tubes
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
33
Discharge tubes with provision for emergence of electrons or ions from the vessel; Lenard tubes
02
Details
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
33
Discharge tubes with provision for emergence of electrons or ions from the vessel; Lenard tubes
02
Details
04
Windows
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
02
Details
04
Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
06
Electron sources; Electron guns
075
Electron guns using thermionic emission from cathodes heated by particle bombardment or by irradiation, e.g. by laser
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
02
Details
20
Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
26
Electron or ion microscopes; Electron- or ion-diffraction tubes
28
with scanning beams
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
26
Electron or ion microscopes; Electron- or ion-diffraction tubes
29
Reflection microscopes
Applicants:
THE UNIVERSITY OF BRITISH COLUMBIA [CA/CA]; Industry Liaison Office, 103-6190 Agronomy Road Vancouver, British Columbia V6T 1Z3, CA
THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY [US/US]; Office of the General Counsel, Building 170, 3rd Floor, Main Quad, P.O. Box 20386 Stanford, California 94305-2038, US
Inventors:
NOJEH, Alireza; CA
CHANG, Mike H.C.; CA
DRIDI, Kais; CA
SAWATZKY, George Albert; CA
PAUL, Reuben Levi; CA
PEASE, Dr. R. Fabian W.; US
Agent:
KEELER, Todd; CA
DE KLEINE, Geoffrey; CA
ALLARD, Louis; CA
BEHMANN, Curtis B.; CA
BOOCOCK, Graeme; CA
COGHLAN, Jeffrey; CA
COLLARD, Christine J.; CA
CONN, David L.; CA
DAMIANI, Michael; CA
EVENSON, Brandon; CA
FRITZ, Joachim T.; CA
GORDON, Jeffrey Keith; CA
HOWG, Jason L.; CA
HUNG, Shin H.; CA
MARSMAN, Kathleen E.; CA
MUELLER-NEUHAUS, Jason; CA
NAUMAN, David; CA
PUNDSACK, Scott R.; CA
RAOUL, Jennifer M.; CA
SILVER, Gail C.; CA
SOJONKY, Andrew D.; CA
VICKERS, Mark F.; CA
WEBB, Tim E.; CA
WOOD, David; CA
ZIMMERMAN, Gordon; CA
Priority Data:
62/440,20529.12.2016US
Title (EN) OPTICALLY ADDRESSED, THERMIONIC ELECTRON BEAM DEVICE
(FR) DISPOSITIF À FAISCEAU D'ÉLECTRONS THERMIONIQUE À ADRESSAGE OPTIQUE
Abstract:
(EN) An electron beam source is provided that includes a vessel forming a chamber, a cathode disposed within the chamber, the cathode comprising a low dimensional electrically conductive material having an anisotropic restricted thermal conductivity, an electrode disposed in the chamber, the electrode being connectable to a power source for applying a positive voltage to the electrode relative to the cathode for accelerating free electrons away from the cathode to form an electron beam when the cathode is illuminated by electromagnetic (EM) radiation such that the cathode thermionically emits free electrons, and an electron emission window in the chamber for passing a generated electron beam out of the chamber. An electron microscope that incorporates the electron beam source is also provided.
(FR) L'invention concerne une source de faisceau d'électrons qui comprend un récipient formant une chambre, une cathode disposée à l'intérieur de la chambre, la cathode comprenant un matériau électriquement conducteur de faible dimension ayant une conductivité thermique limitée anisotrope, une électrode disposée dans la chambre, l'électrode pouvant être connectée à une source d'alimentation pour appliquer une tension positive à l'électrode par rapport à la cathode pour accélérer des électrons libres loin de la cathode pour former un faisceau d'électrons lorsque la cathode est éclairée par électromagnétique (EM) de telle sorte que la cathode émet de manière thermionique des électrons libres, et une fenêtre d'émission d'électrons dans la chambre utilisée pour faire passer un faisceau d'électrons généré hors de la chambre. L'invention concerne également un microscope électronique qui incorpore la source de faisceau d'électrons.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)