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1. (WO2018108440) AN OPTICAL DEVICE AND ASSOCIATED SYSTEMS

Pub. No.:    WO/2018/108440    International Application No.:    PCT/EP2017/079481
Publication Date: Fri Jun 22 01:59:59 CEST 2018 International Filing Date: Fri Nov 17 00:59:59 CET 2017
IPC: G03F 7/20
G02B 26/08
Applicants: ASML NETHERLANDS B.V.
Inventors: OEMRAWSINGH, Sumant, Sukdew, Ramanujan
BLEEKER, Arno, Jan
STRUYCKEN, Alexander, Matthijs
VAN DER PASCH, Engelbertus, Antonius, Fransiscus
VAN DRIEËNHUIZEN, Bert, Pieter
Title: AN OPTICAL DEVICE AND ASSOCIATED SYSTEMS
Abstract:
An alignment system aligns a laser beam to a desired position in a reference plane and to a desired direction in the reference plane. The system diffracts the laser light into different diffraction orders that are projected onto a detection plane using different lenses. As the locations of the projections of the different diffraction orders in the detection plane respond differently to changes in position and in direction of the beam in the reference plane, the locations of the projections enable to determine how to adjust the beam so as to get the beam properly aligned. The diffraction and the projection can be implemented by a hologram.