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1. (WO2018108239) LTPS LAYER QUALIFICATION ON DISPLAY SUBSTRATES BY INLINE SEM USING A MULTI PERSPECTIVE DETECTOR AND METHOD FOR INSPECTING A LARGE AREA SUBSTRATE

Pub. No.:    WO/2018/108239    International Application No.:    PCT/EP2016/080662
Publication Date: Fri Jun 22 01:59:59 CEST 2018 International Filing Date: Tue Dec 13 00:59:59 CET 2016
IPC: H01J 37/28
H01J 37/22
G06T 7/55
Applicants: APPLIED MATERIALS, INC.
MUELLER, Bernhard G.
ZHANG, Xuena
NUNAN, Peter
VIRDI, Kulpreet Singh
Inventors: MUELLER, Bernhard G.
ZHANG, Xuena
NUNAN, Peter
VIRDI, Kulpreet Singh
Title: LTPS LAYER QUALIFICATION ON DISPLAY SUBSTRATES BY INLINE SEM USING A MULTI PERSPECTIVE DETECTOR AND METHOD FOR INSPECTING A LARGE AREA SUBSTRATE
Abstract:
A method for inspecting a substrate is described. The method includes providing the substrate being a large area substrate in a vacuum chamber, wherein the substrate has a thin-film with a grain structure deposited on the substrate; generating a primary charged particle beam with an imaging charged particle beam microscope, wherein the primary charged particle beam impinges on the substrate in the vacuum chamber; and generating one or more images from signal particles released from the substrate upon impingement of the primary charged particle beam, wherein the one or more images are topographic images.