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1. (WO2018107666) POROUS SILICON-BASED GAS SENSOR AND METHOD THEREOF APPLIED IN GAS DETECTION

Pub. No.:    WO/2018/107666    International Application No.:    PCT/CN2017/085620
Publication Date: Fri Jun 22 01:59:59 CEST 2018 International Filing Date: Thu May 25 01:59:59 CEST 2017
IPC: G01N 27/00
Applicants: SHANGHAI INDUSTRIAL μTECHNOLOGY RESEARCH INSTITUTE
上海新微技术研发中心有限公司
Inventors: JIAO, Jiwei
焦继伟
YUAN, Sujun
袁素珺
Title: POROUS SILICON-BASED GAS SENSOR AND METHOD THEREOF APPLIED IN GAS DETECTION
Abstract:
A porous silicon-based gas sensor and method thereof applied in gas detection, the porous silicon-based gas sensor comprising a double-layer modified porous silicon consisting of a lower-layer porous silicon (2) and an upper-layer porous silicon (1) that are modified using the same method. The lower-layer porous silicon (2) is connected to the upper-layer porous silicon (1), and a bottom portion of the lower-layer porous silicon (2) is closed; gas adsorbed by the upper-layer porous silicon (1) may enter the lower-layer porous silicon (2); the average pore diameter of the upper-layer porous silicon (1) is larger than the average pore diameter of the lower-layer porous silicon (2); and a method for modifying the double-layer porous silicon comprises a gas phase method or a liquid phase method. The porous silicon-based gas sensor may continuously detect gas, may still play a role after a power failure, and has the advantages of low energy consumption, not requiring activation and being low cost. At the same time, the preparation of the porous silicon is simple and low in cost, consideration of problems such as recycling is not necessary, and the porous silicon-based sensor may be directly discarded and replaced in practical application.