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1. (WO2018107429) SUPER JUNCTION COMPONENT AND MANUFACTURING METHOD THEREFOR

Pub. No.:    WO/2018/107429    International Application No.:    PCT/CN2016/110085
Publication Date: Fri Jun 22 01:59:59 CEST 2018 International Filing Date: Fri Dec 16 00:59:59 CET 2016
IPC: H01L 29/06
H01L 29/78
H01L 21/336
Applicants: SHENZHEN SANRISE-TECH CO., LTD.
深圳尚阳通科技有限公司
Inventors: PENG, Cheng
曾大杰
XIAO, Sheng'an
肖胜安
Title: SUPER JUNCTION COMPONENT AND MANUFACTURING METHOD THEREFOR
Abstract:
A super junction component. A super junction structure is formed by alternately arranging second conductive type columns that are filled in grooves and first conductive type columns formed by first conductive type epitaxial layers between the grooves. A side surfaces of the grooves (503) are inclined. Each second conductive type column comprises a first filling layer and a second filling layer, the first filling layer (504) covers the side surfaces and the bottom surface of each groove (503), and the second filling layer (505) is laminated on the surface of the first filling layer (504); and the two filling layers are doped in the second conductive type, doping concentrations of the first filling layers are high, and total doping amounts of the second conductive type columns at different depths of the grooves are determined by the first filling layers (504), so as to suppress the impacts of inclined structures of the side surfaces of the grooves on the total doping amounts at different depths of the grooves, and enhance the balance of P-type and N-type total doping amounts at different depths of the grooves. Also disclosed is a manufacturing method for the super junction component. The balance of P-type and N-type impurities at the top parts and the bottom parts of the grooves having inclined side surfaces can be improved, and the breakdown voltage can be increased.